The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer ... layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure.

consider the cantilever (see right), one of the most common MEMS constructions. In mechanical engineering, a cantilever is a rigid structure, often a beam or a plate, anchored at one end to a support.

This 3D information can be used to obtain very accurate and repeatable height measurements for a step within a MEMS structure. The added advantage of a full 3D representation of the surface is the ...

MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...